摘要
A rectangular bimorph will vibrate in bending mode under alternating current （AC） electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occurs on the short center line. Using bimorpb type vibrators forementioned as actuators, an invention of simple traveling machine based on stick-slip principle is presented. The machine can not only move along both x and y direction within horizontal working plane, furthermore, excellent bearing ability and agile response as well as stable step are also proved. In addition, the machine can work on stepping mode and scanning mode at the same time, hence the contradiction between long stroke and high precise positioning is solved. Therefore, it meets the needs of micro/nanometer precise positioning under long stroke and is desired to be used as carrying stage for micro-assembling system and locomotive mechanism for miniature robot system.
A rectangular bimorph will vibrate in bending mode under alternating current （AC） electric field. If two opposite tips along longitudinal direction are both clamped, the maximum magnitude of bending displacement occurs on the short center line. Using bimorpb type vibrators forementioned as actuators, an invention of simple traveling machine based on stick-slip principle is presented. The machine can not only move along both x and y direction within horizontal working plane, furthermore, excellent bearing ability and agile response as well as stable step are also proved. In addition, the machine can work on stepping mode and scanning mode at the same time, hence the contradiction between long stroke and high precise positioning is solved. Therefore, it meets the needs of micro/nanometer precise positioning under long stroke and is desired to be used as carrying stage for micro-assembling system and locomotive mechanism for miniature robot system.
基金
This project is supported by National Hi-tech Research and Development Program of China (863 Program, No. 2002AA423150)
National Natural Science Foundation of China (No. 50475010).
