摘要
介绍了一种量热式质量流量计的原理,并较详细地说明了用于氟化氢质量流量测量流量计的结构、测试与应用。该流量计可用于其它气体质量流量的测量。
A calorimeter-type mass flowmeter is proposed in this paper. The working principle, structure, and applications of an HF mass flowmeter is presented in detail. The mass flowmeter is also suitable for applications in other gases.
出处
《仪表技术与传感器》
CSCD
北大核心
1996年第12期23-27,共5页
Instrument Technique and Sensor
