摘要
讨论了一种制作球面和非球面轮廓光学微结构的新方法。此方法的关键步骤是(100)硅在KOH∶H2O中的两步各向异性腐蚀。首先在硅衬底的掩膜上要开一组圆孔,圆孔的尺寸与最终的轮廓相对应。通过腐蚀,硅衬底上会出现一组凹球面状的微结构,具有一定轮廓特征的微结构可以由一组这样的凹球面微结构拼接而成。用这个方法可以简单高效地制作出很多用常规工艺难以加工的非球面、不规则的光学微结构。建立了描述此方法的模型,并进行了讨论分析。
A new method to fabricate optical microstructures with different profiles such as spherical and aspherical outlines is discussed. The most key technological step is a two-step anisotropic etching of KOH：H2O to （100） silicon substrate with resistant mask in which many circular openings are preshaped. The size of these openings is according to the feature appearance of the final structure. A pattern structure in substrate can he formed through connecting many small concave spherical structures formed by chemical etching. Using the method, many aspherical and irregular microstructures, which can not be produced by common technologies available currently, can be fabricated easily and efficiently. A model to describe the fabrication is set up and discussed.
出处
《激光与红外》
CAS
CSCD
北大核心
2007年第3期271-274,共4页
Laser & Infrared
关键词
硅各向异性腐蚀
光学微结构
非球面
anisotropic etching of silicon
optical microstructure
aspheric
