摘要
详细介绍了化学浴、连续离子层吸附反应、液相沉积法、溶胶-凝胶法、粘结剂法和溅射法等低温制备TiO2薄膜的常用方法,概述了其制膜原理和薄膜性能,指出低温制备TiO2晶态薄膜技术目前存在的问题及未来的发展方向。
Some low-temperature syntheses for TiO2 film including chemical bath deposition, liquid phase deposition, successive ionic layer adsorption and reaction, sol-gel, mixed paste, and sputtering,are introduced in detail in this paper. The mechanism and the properties of TiO2 film prepared are reviewed, and the problems in low-temperature syntheses for TiO2 film and their development trends are pointed out.
出处
《现代化工》
EI
CAS
CSCD
北大核心
2007年第3期26-29,31,共5页
Modern Chemical Industry
关键词
二氧化钛
光催化剂
薄膜
低温制备
TiO2
photocatalyst
thin film
low-temperature preparation
