摘要
以一种通过体微机械加工技术制备的音叉振动式微机械陀螺为对象,基于随机摄动技术定量研究了微机械陀螺固有频率变异的统计特征,以概率思想表达了微机械陀螺批量加工过程所带来的材料/尺寸随机误差对其各阶固有频率的影响。通过所提出的影响系数这一概念反映了微机械陀螺参数变异对固频变异的敏感度。在详尽分析微机械陀螺众多参数的影响系数的基础上,获得了微机械陀螺最为关键的6个参数。这有限关键参数的获得,不仅为微机械陀螺的健壮性设计提供了方向,同时也为实际微机械陀螺的加工控制提供了量化的可参考依据。
Focusing on a tuning fork vibratory micromachined gyroscope fabricated through silicon bulk mi cromachining, the matrix perturbation technology in the random finite element method is first introduced to analyses the statistical characteristics of the natural frequencies of tuning fork vibratory gyroscope. The influence of random material parameters and dimensional parameters on the natural frequencies of a micromachined gyroscope are quantitatively described by a so-called impact coefficient based on the probability theory. The impact coefficient exactly point out the sensitivity of parameter variance to natural frequency variance and finally bring out the six key parameter of a microgyroscope. The limited key parameters not only simplify the dimensions of design space for the robust optimization design of a microgyroscope, but also provide a special quantitative reference to the accuracy control in the fabrication procedures of the microgyroscopes.
出处
《航空学报》
EI
CAS
CSCD
北大核心
2007年第1期245-248,共4页
Acta Aeronautica et Astronautica Sinica
基金
国家自然科学基金(50475019
50390063)
国家"863"计划(2006AA04Z303)
关键词
微机械陀螺
影响系数
随机参数
固有频率
离差系数
摄动法
micromachined gyroscope
impact coefficient
random parameter
natural frequency
coefficient of dispersion
perturbation method
