摘要
本文介绍了利用蒙特卡罗方法模拟计算不同衬底上铝膜发射的特征X线强度与纯铝块状试样发射的X射线强度比I_c/I_B随加速电压E_o变化的曲线,当I_c/I_B→1时可得到E_d。以及直接摸拟计算不同衬底上铝膜试样的衬底发射x线强度与铝膜发射X线强度之比I_s/I_c随E_o的变化曲线,当I_s/I_c→0时可得到E＇_d。E_d和E＇_d具有相同的物理含意,将其代入Castain的X射线激发深度公式可以计算确定衬底上薄膜的厚度。对这两种方法比较的结果表明,采用后一种无标样法确定E_d具有更高的灵敏度,因而对膜厚的测定更为准确。
Monte-Carlo method is used to calculate two kinds of curves. One is the intensity ratioes I~ / Ib versus
accelerration voltages Eo. Ic, the characteristic intensity from the A1 film on different substractures; lb, the in-tensity from A1 bulk standard. When I~/Ib tends to 1, we can get Ea. Another is the intensity ratioes Is / Ic vorsus Eo. Ic, as mentioned before; Is,the intensity from the substracture of the samd sample. When Is /Ic tends to o, we can get Ed'. Ed and Ed' have the same physics meaning and we can put it into Cas.tain/s formula of X ray excited depth to get the thickness of film. After comparing these two methods, the re-sults shows that the standardless method has the heigher sensitivity, therefore it is more accurate to determine the film thickness by using this method.
出处
《电子显微学报》
CAS
CSCD
1990年第1期48-52,共5页
Journal of Chinese Electron Microscopy Society
