摘要
An optical fiber pressure sensor has been developed for the measurement in human body.The sensing element is possessed of a membrane structure,which is fabricated by micromachining.The fabrication process includes anisotropic wet etching on the silicon wafer.For the transmitting source and signal light,a multimode optical fiber 50/125 μm (core/clad)in diameter was used.The intensity of the light reflected back into the fiber varies with the membrane deflection,which is s function of pressure.The deflection of the membrane by applied pressure can be mathematically described.
An optical fiber pressure sensor has been developed for the measurement in human body. The sensing element is possessed of a membrane structure, which is fabricated by micromachining. The fabrication process includes anisotropic wet etching on the silicon wafer. For the transmitting source and signal light, a multimode optical fiber 50/125 μm （core/clad） in diameter was used. The intensity of the light reflected back into the fiber varies with the membrane deflection, which is a function of pressure. The deflection of the membrane by applied pressure can be mathematically described.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期476-478,共3页
Rare Metal Materials and Engineering
基金
supported by National Science Foundation of the U.S.,under fund cite NSF 03-512
supported by National‘863 Project'of China,under fund cite A05106AA5114.
