摘要
<正>SnO_2 thin film sensors were fabricated by a thermal evaporation method.The sensors were heated for thermal oxidation.For high porosity,SnO_2 thin film sensors were treated in a N_2 atmosphere.The sensors that were treated with O_2 after being treated with N_2 showed 70 % sensitivity for 1×10~ -6) of H_2S,which is higher than the sensors that were only treated with O_2.The Ni metal,as a catalyst,was evaporated on the thin film Sn on the Al_2O_3 substrate.The sensor was heated to grow the Sn nanowire in a tube furnace with N_2 flow.Sn nanowire was heated for oxidation.The sensitivity of SnO_2 nanowire sensor was measured for 500×10~ -9) of H_2S.The selectivity of the SnO_2 nanowire sensor was compared with the thin film and the thick film SnO_2.Each sensor was measured for H_2S,CO,and NH_3 in this study.
SnO2 thin film sensors were fabricated by a thermal evaporation method. The sensors were heated for thermal oxidation. For high porosity, SnO2 thin film sensors were treated in a N2 atmosphere. The sensors that were treated with O2 after being treated with N2 showed 70 % sensitivity for 1 × 10^-6 of HES, which is higher than the sensors that were only treated with O02. The Ni metal, as a catalyst, was evaporated on the thin film Sn on the Al2O3 substrate. The sensor was heated to grow the Sn nanowire in a tube furnace with N2 flow. Sn nanowire was heated for oxidation. The sensitivity of SnO2 nanowire sensor was measured for 500 × 10^-9 of HES. The selectivity of the SnO2 nanowire sensor was compared with the thin film and the thick film SnO2. Each sensor was measured for H2S, CO, and NH3 in this study.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2006年第A03期385-388,共4页
Rare Metal Materials and Engineering
