摘要
利用射频辉光放电法在不锈钢衬底上制备了类金刚石薄膜（Ｄｉａｍｏｎｄ－ｌｉｋｅｃａｒｂｏｎｆｉｌｍｓ，简称ＤＬＣ）．用显微硬度计测试了薄膜与衬底的复合硬度和衬底硬度，并用Ｂ．Ｊｏｎｓｓｏｎ和Ｂ．Ｈｏｇｍａｒｋ方法将薄膜硬度分离出来，得到了硬度值与制备参数间的关系，确定了在不锈钢衬底上沉积高硬度和强附着度类金刚石薄膜的最佳工艺条件范围．并对实验结果进行了理论解释．
Diamond-like carbon films were deposited on stainless steel by using r.f. glow discharge method. The compound hardness of the films and substrate was measured and seperated with the method proposed by B. Jonsson and S. Hogmark. The relation between the film hardness and deposition parameters was obtained, the optimum deposition conditions under which high hardness and strong adhesive DLC films can be deposited on the stainless steel, were also determined.
出处
《无机材料学报》
SCIE
EI
CAS
CSCD
北大核心
1996年第4期639-645,共7页
Journal of Inorganic Materials
基金
北京市自然科学基金
