摘要
利用退火技术制作出自旋阀型GMR线性传感器,传感器矫顽力低于0.01Oe,具有良好的线性,电阻条的宽度与传感器器线性范围和灵敏度直接相关,随着条宽减小,传感器器的线性范围增加而灵敏度降低,实验和理论计算的结果一致.
Using annealing technology GMR linear sensor based on spin valve is fabricated. The coercivity of GMR sensor is less than 0.01Oe, the sensor is good linearity. The wide of serpentine sensing resistor affect the capability of GMR sensor. With the wide of serpentine sensing resistor reducing, the linear range of GMR sensor is increase and the sensitivity of GMR sensor is reducing, the results of experiment and theory simulation are consistent.
出处
《传感技术学报》
CAS
CSCD
北大核心
2006年第05B期2065-2067,2071,共4页
Chinese Journal of Sensors and Actuators
基金
国家自然基金支持(90607021)
关键词
自旋阀
巨磁电阻
线性传感器
spin valve
giant magnetorsistance
linear sensor
