摘要
介绍了坩埚下降法生长的优质四硼酸锂晶体（ＬＢＯ）７６ｍｍ（３英寸）标准圆片的加工工艺，讨论了ＬＢＯ圆片的质量。研究表明。
Aiming at the acoustic load sensitivity of the quartz crystal resonator(QCR),two generally applicable formulae of the relationship between the surface state of the QCR and its resonant resistance and frequency are deduced on the basis of a three layer mechanical model.From theorctical analysis of quartz crystal resonator gas humidity sensor,it is found that both the resonant amplitude and frequency can be used as measuring parameters.The resonant amplitude mainly reflects surface damping.The resonant frequency mainly reflects surface mass load,but it can also be affected by surface damping,and attention should be paid seriously while developing sensors.
出处
《压电与声光》
CSCD
北大核心
1996年第6期403-406,共4页
Piezoelectrics & Acoustooptics
基金
中科院"七五"院重大项目课题
关键词
四硼酸锂晶体
圆片
加工
声表面波
压电晶体
quartz crystal,resonator,acoustic load sensitivity,surface sorption,sensor
