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微纳米加工与检测技术进展

Progress of Micro-Meso Mechanical Manufacturing and Measurement Technology
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摘要 微纳米加工技术是一个新兴的综合性的制造技术,有良好的应用前景。本文分析了微纳米加工技术(M4)的应用领域及前景,介绍了各种微纳米加工技术及其与传统制造技术的对比,介绍了运用M4技术加工的一些产品零件及其误差,并介绍微纳米检测技术的几种实现方法及其与微纳米加工技术的关系。 Micro-Meso Mechanical Manufacturing (M4) and Measurement Technology is a rising synthetic technology, with great application prospect. The application field and prospect of M4 is analyzed, compared with traditional manufacturing technologies; some products made with M4 is introduced. In the end, Micro-Meso Measurement Technology is introduced.
出处 《三明学院学报》 2006年第2期121-123,共3页 Journal of Sanming University
关键词 微纳米 微纳米加工 微纳米检测 Micro-Meso processing Micro-Meso measurement Micro-Meso
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