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傅里叶红外显微光谱技术测量HgCdTe晶片组分分布与截止波长分布

DISTRIBUTION OF THE COMPOSITION AND THE CUT-OFF WAVELENGTH OF HgCdTe WAFER DETERMINED BY FOURIER TRANSFORM INFRARED MICROSCOPY
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摘要 运用傅里叶红外显微光谱技术测量了HgCdTe晶片上透射光谱分布,并通过编程处理,得到HgCdTe晶片组分分布和截止波长分布图。 It is described in this paper that Fourier Transform infrared (FTIR) microscopy is of use for mapping the transmission spectrum of HgCdTe wafer, by which the distribution diagram of the composition and cut-off wave-length of the wafer can be estimated in computer with proper software.
出处 《红外与激光工程》 EI CSCD 1996年第6期36-38,共3页 Infrared and Laser Engineering
关键词 傅里叶谱仪 红外光谱仪 HgCdTe晶片 测量 Subject Fourier spectrometer Infrared spectrometer Mercuty cadmiun telluride Composition (property ) Cut- off frequency Distribution(property)
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