摘要
建立了一套碲镉汞薄晶片加工过程中的少数载流子寿命面分布自动检测系统，用于碲镉汞多元光导器件制备工艺生产线，获得了１８０元器件性能分布同薄晶片少数载流子寿命分布一致的结果。
It is described in this paper that an automatic system for measuring the area distribution of the minority carrier lifetime of the HgCdTe wafer in process has been set up as one important part of the production line of HgCdTe multielement photoconductive device. Satisfied result has been obtained that the distribution of the performence of the 180-element device is consistent with the measured area distribution of the minority carrier lifetime of HgCdTe wafer.
出处
《红外与激光工程》
EI
CSCD
1996年第6期25-30,共6页
Infrared and Laser Engineering
关键词
HGCDTE
载流子寿命
自动测试
光导器件
Subject Mercury cadmiun telluride Carrier lifetime Automatic measurement
