摘要
提出了用声表面波滤波器测知加速度方向和大小的方法,研究了电容器中的静电吸引力对加速度计敏感质量块的位置稳定作用,以及用它扩大悬臂梁式加速度计量程的原理。用SAW滤波器和电容器中的静电吸引力扩大和调整了悬臂梁式基本加速度计的量程之后,需要对量程调整后的加速度计测量值进行校准和计量标定。本文利用精密离心机转速与其向心加速度之间的对应关系对SAW加速度计的测量数据进行了计量标定。
A new method using surface acoustic wave filter （SAWF） and electrostatic force in parallel-plate capacitor for expanding the measurement range of accelerometer with cantilever beam is put forward. The effect of electrostatic force on stabilizing the position of the sensitive mass block in the accelerometer and the elementary principle of expanding the measurement range using this effect are discussed. The calibration method for calibrating the accelerometer with cantilever beam is studied. The SAW accelerometer was calibrated using the relationship between the rotating speed of the centrifugal machine and its centripetal acceleration.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2006年第9期1052-1056,共5页
Chinese Journal of Scientific Instrument
关键词
悬臂梁式SAW加速度计
量程调整
计量校准和标定
离心机
SAW accelerometer with cantilever beam enlarging measure range of accelerometer rectifying and demarcating centrifugal machine
