摘要
提出一种新型的压电精密步进旋转驱动器。该驱动器采用仿生运动的原理,以定子内箝位的方式和均布薄壁柔性铰链微变形结构,解决了以往压电精密驱动器箝位不牢固、旋转步进频率较低、行程小、分辨率低、速度低、输出不稳定等问题。研制的精密旋转驱动器能够实现高频率(30 Hz)、高速度(380μrad/s)、大行程(>270°)、高分辨率(1μrad/step)、且输出稳定,大幅度提高了压电步进旋转驱动器的驱动性能。该驱动器在精密运动、微操作、光学工程、精密定位等精密工程中有广阔的应用前景。
A novel piezoelectric （PZT） precision step rotary actuator was developed based on the PZT technology. It adopts the principle of bionics and works with a inside anchoring/loosening of the stator and a distortion structure of the uniformly distributed thin flexible hinge to solve the problems such as ineffective anchoring/loosening, low step rotary frequency, small travel, poor resolution, low speed and unsteady output, etc. The developed actuator is characterized by high frequency （30 Hz）, high speed （380μrad/s）, large travel （ 〉 270°）, good resolution （1 μrad/step） and work stability. It improves significantly the drivability of the existing PZT step rotary actuator, can be applied in the field of micromanipulation and precision engineering, such as precision driving and positioning, optics engineering, etc.
出处
《吉林大学学报（工学版）》
EI
CAS
CSCD
北大核心
2006年第5期673-677,共5页
Journal of Jilin University:Engineering and Technology Edition
基金
'863'国家高技术研究发展计划项目(2002AA423150)
关键词
机械工程
压电陶瓷
步进驱动器
箝位
柔性铰链
mechanical engineering
piezoelectric element
step actuator
anchoring/loosening
flexible hinge
