摘要
环形子孔径拼接测试技术是一种无需辅助元件就能检测旋转对称大口径非球面镜的有效手段。根据该技术的检测原理及基于Zernike多项式的“拼接”算法,提出了一种相应的环形子孔径数据提取方法。该方法基于商用相移干涉仪的CCD成像系统和其数据处理软件提供的Mask编辑功能,利用被测镜面上方的三个可移动的基准标记进行绝对定位,给出了具体的实施方案。对一口径700mm、F2的抛物面主镜进行实验,研究结果表明,该数据提取方法操作简单可行,适合于加工车间的实施,取得了符合“拼接”算法需求的子孔径测试数据和对应环带的内外半径值。
Annular subaperture stitching technique is a feasible method for testing rotationally symmetric aspheric mirror without any additional elements. According to the measurement principle and stitching algorithm with Zernike polynomials, a corresponding extraction method of annular subaperture data is provided, which are based on the CCD imaging system of a commercial interferometer and mask function in the data process software, and absolute position is confirmed by three mobile fiducial marks above the tested aspheric mirror. The manipulative scheme is provided in detail. Experimental results of testing a D 700mm, F2 parabolic mirror with D 160mm obscuration show that the extraction method is efficient and simple. In addition, the method is suitable for the optical fabrication shop, and the annular subaperture data and the corresponding radius values required by the stitching algorithm are gained.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2006年第8期113-116,131,共5页
Opto-Electronic Engineering
基金
国家863高技术资助项目
关键词
光学测量
非球面镜
环形子孔径
数据提取
Optical measurement
Aspheric mirrors
Annular subaperture
Data extraction
