摘要
在铬原子光刻中可采用铬原子束激光感生荧光(LIF)来实现激光频率的稳定,以满足原子光刻对激光频率稳定性的要求。激光感生荧光稳频技术除有很高的稳频精度以外,还可以获得相对于原子共振频率的一定失谐量。本文根据已有的实验条件和参数从铬原子束的速率分布、激光频率与荧光斑点中心横向位移的关系、二象限光电探测器测得的误差信号等方面对铬原子束激光感生荧光(LIF)稳频技术作了理论分析。
The success of laser cooling makes atom lithography easy to obtain well collimated atomic beam.Because of that collimated atomic beam is a good method among laser spectroscopy,atomic beam laser induced fluorescenco（LIF）can be used for the laser frequency stabilization in atom lithography. Except that LIT can get high precision for the laser frequency stabilization, it can make laser frequency detune from one atomic resonance frequency easy and exact. Some aspects, which are based on our own special condition,such as Ca atomic beam,fluoreseence,difference signal,the correlation between laser frequency and the central of fluorescence are analyzed for laser frequency stabilization derived from the Ca atomic beam laser induced fluorescence（LIF）.
出处
《中国测试技术》
CAS
2006年第3期12-15,共4页
CHINA MEASUREMENT & TESTING TECHNOLOGY
基金
上海市科学技术发展基金项目(0259nm-034)
关键词
原子光刻
激光感生荧光
原子束激光稳频
Atom lithography
Laser induced fluorescence（LIF）
Laser frequency stabilization
