摘要
数字相关滤波精密检测是随着现代光电子技术，计算机技术的进步而发展起来的一门新兴技术，在现代科技与制造业，尤其是在超大规模集成电路制造等领域中非接触高精密测量方面具有重要的实用价值。本文通过实例，介绍了问题的提出，数字相关滤波的理论，探讨了在非接触式精密位置检测与控制系统中的应用原理及实现方法。文末，还就相关滤波的其它有关应用作了简介。
The precision measuring with digital correlation filtering is a new technology developed with the achievements of modern photoelectric and computer technology. It has great application value in modern science,technology and manufacturing indLlstries, especially in the manufacturing of SLSI. With examples, the article introduces the theory of digital correlation filtering and its application principle and method in the non-touch precision positioning system.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第3期38-45,共8页
Optics and Precision Engineering
