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金属Micro/Meso结构器件制造技术 被引量：2

Fabricating Metal Micro/Meso-Structures &-Devices
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摘要 具有特定功能或满足特定需要的复杂形状金属micro/meso结构器件的加工,是非硅基MEMS制造和微细加工领域的一项重要内容。论述了制造金属micro/meso结构器件的几种常用加工技术(精密机械加工技术、LIGA和LIGA-like技术、微细电火花加工技术、微细电解加工技术和选择性电沉积技术等)及其工艺进展,并分析了它们的优缺点。 The fabrication of metal micro/meso-structures ＆ -devices with some special function or meeting some special needs is an important task in non-Si-MEMS fabricating and micromachining. Several useful microfabrication techniques were reviewed including uhraprecision machining, LIGA and LIGA-like, micro electrodischarge machining, micro electrochemical machining and selective electrodeposition for producing metal micro/meso-structures ＆-devices, and their advantages and disadvantages were analyzed.
作者 明平美 胡洋洋 曾永彬
机构地区 河南理工大学机械与动力工程学院 南京航空航天大学机电工程学院
出处 《微纳电子技术》 CAS 2006年第6期301-306,共6页 Micronanoelectronic Technology
关键词 金属微结构 金属微器件 亚微加工 微细加工 metal microstructures metal microdevices meso-machining microfabrication
分类号 TG506 [金属学及工艺—金属切削加工及机床]
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参考文献35

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二级参考文献45

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共引文献30

同被引文献12

  • 1张朝阳,朱荻,王明环.纳秒脉冲微细电化学加工的理论及试验[J].机械工程学报,2007,43(1):208-213. 被引量：24
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  • 10李建勋,胡晓兵,杨洋.微细加工技术的发展及应用[J].现代机械,2007(4):76-78. 被引量：10

引证文献2

二级引证文献7

微纳电子技术
2006年 第6期

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