3I.eybovieh A, Kuniya T. Effects of aluminum sputtering target surface grain relief and eD, stal.lographie orientation on sputtering 1-V characteristicsi [J]. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 1993, 11(4): 1553-1557.
4Bailey R S. Etleets of target microstructure on aluminum alloy sputtered thin fihn properties [ J]. Journal of Vacuum Science & Technology A: Vacumn, Surfaces, and Films, 1992,10 (4) : 1701-1705.
5Roberts Bailey, Nicholas C Hill. Effect of sputtering target crystallographic orientation on step coverage and collimation efficiency [ J ]. SPIE, 2003, 4: 95-96.
