摘要
在半导体器件的生产过程中需要定期测量扩散炉、合金炉的恒温区段,针对人工测量效率低,精度差等问题,设计了基于LabVIEW虚拟仪器的恒温区自动测量系统,阐述了系统的组成和测量原理。
In a semiconductor device production line, the constant temperature segment of a diffusion furnace have to be measured regularly. And the working efficiency and precision is low. In stead of this manually system, an automatic constant temperature mea- surement system basing on the virtual instrument has been designed. The configuration and principle of the auto-measure system is given in the paper.
出处
《微计算机信息》
北大核心
2006年第05S期170-171,207,共3页
Control & Automation
基金
国家教委十五"211工程"重点学科建设项目项目编号:(D030400404011)
关键词
虚拟仪器
恒温区
测量
Virtual Instrument constant temperature range measurement
