摘要
阐述了消杂光的遮光罩和挡光环的设计原理和思想,并基于自行推导的设计公式,提出利用程序计算来实现遮光罩—挡光环四种不同组合(圆柱状且挡光环等高布置、圆柱状且挡光环梯度布置、锥状且挡光环等高布置和锥状且挡光环梯度布置的遮光罩)的设计思想,并给出了设计实例以验证设计公式程序的正确性(与手工计算相比)。结果表明,在任意给定的挡光环个数和高度范围内,通过该设计程序可获得一系列遮光罩的长度和内径参数,再通过杂光仿真软件模拟,根据PST值可确定遮光罩的最佳参数。
This paper focuses on explaining the principle of the baffles and vanes＇ programmable design. An idea of programmable design of cylindrical baffle and equal height vanes, cylindrical baffle and gradient vanes, conical baffle and equal height vanes, conical baffle and gradient height vanes, which is achieved by designing formulas derived by the author, is proposed. In order to verify accuracy of the designing formulas and programs （compared with the manual calculations）, an example of baffle programmable design has also been given in the end. Calculation results show that a series of the baffie＇s length and inner diameter parameters are obtained by designing program in the given range of vanes＇ number and height, and then simulated by the stray light analysis program. The baffles and vanes＇ best parameters are decided by the PST value which can properly satisfy the system requirements.
出处
《光电工程》
EI
CAS
CSCD
北大核心
2006年第4期119-123,共5页
Opto-Electronic Engineering
