摘要
利用有机无机混合的溶胶凝胶方法在硅基底上制备波导薄膜·采用正硅酸四乙酯和苯基三乙氧基硅烷作为反应先驱物,利用旋涂的方法成膜,对其折射率,传输损耗以及条形波导的光刻、刻蚀特性进行了研究·测量了波导薄膜折射率随成分变化的关系·实验表明,该方法工艺简单,可以获得具有较低损耗的波导薄膜·测试得到632.8nm波段的损耗系数为0.23dB/cm·采用ICP刻蚀工艺获得了较为平整的条形波导·
An organic-inorganic hybrid sol-gel material by using Tetraethylorthosilicate （Teos） and phenyltriethoxysilane（Phtes） as precursors was synthesized, and a planar optical waveguide was fabricated by using spin-coating on silicon substrate. A rib strip waveguide was formed by inductively coupled plasma （ICP）. A relation between refractive index and composition of the precursors was obtained by M-line method; the optical loss of the planar waveguide was measured to be 0.23 dB/cm at 632.8 nm wavelength.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2006年第4期509-512,共4页
Acta Photonica Sinica
基金
上海市科委光科技行动计划(项目编号:022261009)资助项目
