摘要
本文导出了同心环形光栅莫尔条纹在测量平面的水平度方面的定量表达式,并给出了测量结果。利用同心环形光栅莫尔条纹测量水平度,只一步就可以测出,而不需改变光栅的位置,也不需将待测表面绕光轴旋转。
In this paper we have given the quantitative expression of the moire fringes of circular Concentric gratings in the fild of measuring the horizontality of flat surface and the experimental results. In measuring the horizontality of flat surface by the moire frings of circular concentric gratings. we can give the results directly. not to rotate the gratings or the flat surface. The experiments have demonstrated that there isgreat advantage in measuring the horizontality of flat surface by the moire frinqes of circular concentric gratings.
出处
《光电子.激光》
EI
CAS
CSCD
北大核心
1996年第4期226-229,219,共5页
Journal of Optoelectronics·Laser