摘要
文章论述了在半导体工艺中超纯材料和超净环境所处的重要地位和作用，并着重讨论了搞好净化系统、厂房的设计建造和运行管理的几个重要环节，以供从事该项工作的组织管理。
The important roles,actions of super-purity materials and super-clean environment in semiconductor industry was discussed with emphasis on the important links on designing,building and managing purifying systems and factories.And this paper will be hopeful to administrators,engineers and producers in the same technology line.
出处
《半导体光电》
CAS
CSCD
北大核心
1996年第3期199-205,共7页
Semiconductor Optoelectronics
关键词
半导体工艺
超纯材料
超净环境
Semiconductor Technology,Super-purity Materials,Super-clean Environment
