摘要
报道了CVD金刚石膜磨耗比的一种简易快速测量方法。该方法通过测量金刚石膜被磨耗的体积来求得磨耗比。其优点是不使用微量分析天平,因而降低了对实验环境条件的要求,省去了烘干和称重两项工序,测试快速简便。通过与质量法对比,所得数据比较准确可信。
A quick and easy method for measure grind ratio is proposed in order to measure grind ratio against the grind volume of diamond film. It has advantages which lower limit on environment condition because of no using microbalance and operate quickly and easily because of avoiding stove and weight. As compared with gravi metic method , the result show the date If this method is exact and reliable.
出处
《河北省科学院学报》
CAS
2006年第1期50-53,共4页
Journal of The Hebei Academy of Sciences
关键词
CVD金刚石膜
磨耗比
CVD diamond film
Grind ratio volume measure
