摘要
介绍了一种硅微机械FP腔器件,该器件作为光学滤波器、光学衰减器等在光纤通信技术中具有广泛应用·采用化学气相沉积、刻蚀、金属蒸发等工艺对该器件进行加工,并利用湿法腐蚀释放使其形成悬空结构,悬空膜采用静电激励驱动·分析了器件的基本原理、工作范围、静电激励的阈值电压等特性,并指出了影响阈值电压大小的因素·
A device of silicon micromachined Fabry-Perot cavity is introduced. It can be extensive used in the optical fiber communication, such as optical filter and optics attenuator. The device is fabricated by general surface processes, such as LPCVD, RIE, chemical etching and evaporating metal-coating. The silicon nitride film which is suspended above the silicon substrate, is driven by an electrostatic force. The basic principle, operating range and threshold voltage of the device are analyzed, and the factors of influence threshold voltage are discussed. By means of the finite element method, the mechanical, the coupling and the response characteristics of the device are analyzed.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2006年第3期362-364,共3页
Acta Photonica Sinica
基金
国家自然科学基金(60177009
60236010
90207004)
高等学校博士点专项科研基金(20010007010)
"973"计划(2003CB314703
2003CB314704)资助项目
关键词
微机械FP腔
光纤通信
阈值电压
Fabry-Perot Cavity
Optical fiber communication
Threshold voltage
