摘要
介绍了一种模拟计算部分相干光成象的实用化方法。根据部分相干理论，推导出数值计算模型，并采用各种方法简化，减少了计算量。根据计算公式编制出了部分相干成象模拟计算软件，可模拟数值孔径、波长、相干因子、离焦、波象差、物体的线宽、光瞳的中心遮拦等因素对光刻成象质量的影响。
A practical method for imaging simulation of partially coherent system is introduced in this paper.Digital formulas of partially coherent imaging intensity are derived from Hopkins′ theory,and simplified by several methods to reduce calculation quantity without losing of the precision.A simulating software based on these formulas is programmed to make us have a method of image evaluation of optical system illuminated by partially coherent light.The softwave is an useful tool in calculating partially coherent imaging intensity and in researching the effects of the parameters.These parameters include NA ,wavelength,relative NA of condenser,defocus,wave aberrations,linewidth and centre obscuration of pupil.
出处
《光电工程》
CAS
CSCD
1996年第2期20-27,共8页
Opto-Electronic Engineering
关键词
光刻
部分相干成象
象质评价
计算机模拟
光学
Photolithography,Partial coherent imaging,Image evaluation,Computer simulation.
