摘要
本文记述了我国研制的各种超显微镜,包括:透射电镜,扫描电镜,电子探针X射线微区分析仪,电子衍射仪,扫描隧道显微镜,原子力显微镜和光子扫描隧道显微镜的主要性能及发展过程。
The development of various kinds of ultramicroscopes made in China and its mean features were described, including: transmission electron microscopes, scanning electron microscopes,electron probe X-ray microanalyzers, electron diffraction equipments,scanning tunneling microscopes,atomic force microscopes,photon scanning tunneling microscope etc.
出处
《电子显微学报》
CAS
CSCD
1996年第2期353-370,共18页
Journal of Chinese Electron Microscopy Society
关键词
超显微镜
电子显微镜
扫描探针显微镜
仪器制造
ultramicroscope electron microscope scanning probe microscope instrumentation
