摘要
本文利用压电陶瓷逆压电效应研制成功了精密可控微位移器.在静动态试验下效果良好,其线性度、稳定性、回零性和滞后量均达到了理想程度,可用于机床误差补偿和热变形补偿系统中.
Precision controlled micro - displacement unit has been successfully developed according to the inverse piezoelectric effect of pievoelectric ceramics, and it has a good effect in the static and dynamic test, and it achieves a great satisfaction in the case of the linearity, stability, returuable property and stagnation quantity, it is used in compension system on error and heat strain of machime tool.
关键词
压电陶瓷
逆压电效应
微位移
Piezoelectric ceramics, inverse pieroelactric effect, micro-displacement.
