摘要
用一个双层板结构模型来简化典型的表面波谐振器单元,并用三维弹性力学方程来精确分析在其中传播的表面波.与此同时,用O(H)近似方法对有电极的弹性板模型做了近似计算,发现在电极层厚度很小的时候,分析精度相当好.这种近似方法能减少一半的计算量,为分析复杂的模型提供了很好的近似分析方法.
Surface acoustic waves also known as Rayleigh waves, exist in semi-infinite elastic solids only. Engineering applications with finite plates and complications such as metal platings for layered structures are common, and surface acoustic waves in such finite structures are pratically utilized. In search of the accurate solutions tor an essential physical model of surface acoustic wave devices and similar applications, we use three-dimensional equations of elasticity for the accurate analysis of surface acoustic waves. The waves propagate in a two - layer infinite plate to represent the typical single period of a resonator structure with an electrode, which has been studied extensively with various methods including numerical solutions for surface acoustic wave resonator design. Also, we use an approximate method, i. e. , the 0（H） method, for surface acoustic waves in a two-layer infinite plate. We find that when the thickness of the metal layer is relatively thin, the result is very close to the exact one. The proposed method reduces the number of equations by half, thus improves the analytical approaches for more complex structures.
出处
《宁波大学学报（理工版）》
CAS
2005年第4期439-443,共5页
Journal of Ningbo University：Natural Science and Engineering Edition
基金
宁波市人事局资助项目
关键词
电极层
无限大弹性板
表面波
传播
谐振器
electrode layer
infinite elastic plate
surface acoustic waves
propagation
resonator
