摘要
本文论述双波长数字波面干涉术的原理及算法,分析该技术的主要误差及其校正方法。整个软件在IBM—PC上运行通过,完成了自动检测过程并给出表面形貌及主要参数。
This paper describes the principle of the two-wavelength digital wavef-ront interferometry and the computational method. The analyses are also given to the main errors and the removing method. The whole softwares is operated in IBM-PC to complete the course of automatic measuring and data proceseing for surface figure and parameters related.
关键词
双波长
干涉术
等效波长
误差修正
Two-wavelength, Interferometry, Equivalence-wavelength, Error-re duction.
