摘要
利用双放电腔微波等离子体源全方位离子注入设备,分别采用等离子体增强化学气相沉积技术、等离子体源离子注入和等离子体增强化学气相沉积复合技术两种工艺对医用316L不锈钢进行类金刚石薄膜表面改性。利用电化学阻抗谱法考察了两种工艺制备的类金刚石薄膜在模拟体液中的抗腐蚀性能。结果表明:与采用等离子体增强化学气相沉积技术制备的类金刚石薄膜相比,在72 h的浸泡时间内,采用等离子体源离子注入和等离子体增强化学气相沉积复合技术制备的类金刚石薄膜防腐蚀性能明显增高,腐蚀阻抗较高,碳注入层可有效抑制溶液渗入薄膜和基体之间的界面,起到了腐蚀防护层的作用。动电位极化测试表明:采用复合技术制备的类金刚石薄膜在模拟体液中的腐蚀倾向性更低,钝态稳定性更好。
Diamond-like carbon （DLC） coatings used in biomedical fields were deposited on 316L stainless steel by plasma en hanced chemical vapor deposition （PECVD）,hybrid plasma source ion implantation （PSII） and PECVD respectively. The cor rosion behavior of DEC coatings prepared by different methods by electrochemical impedance spectroscopy （EIS） measurement was investigated in approximately neutral simulated body fluid The results show that the DLC coatings by a hybrid PSII and PECVI） technique are more compact than those by the PECVD technique and have greater corrosion resistance during an immersion period of 72 h. The new technique is effective for the carbon implantation layer to prevent the electrolyte from penetrating into the interface between the coating and thesubstrate, acting asa protective layer from corrosion. The potential-dynamic polarization measurements also indicate that the DEC coatings prepared by the hybrid PSII and PECVD technique have less tendency towards corrosion and better passivation stability.
出处
《硅酸盐学报》
EI
CAS
CSCD
北大核心
2005年第11期1314-1320,共7页
Journal of The Chinese Ceramic Society
基金
国家自然科学基金(50081001)
高等学校博士点基金(20010141003)
国家高技术研究发展计划(863计划)(2002AA326010)
大连理工大学三束材料表面改性国家重点实验室资助项目
关键词
类金刚石薄膜
电化学阻抗谱
模拟体液
等离子体源离子注入
等离子体增强化学气相沉积
diamond-like carhon film
electrochemical impedance spectroscopy
simulated body fluid
plasma source ion implantation
plasma enhanced chemical vapor deposition
