摘要
提出一种基于LM I(线性矩阵不等式)算法的超精密隔振平台控制系统设计方法。该方法将超精密隔振平台控制系统设计问题转化为一个具有线性矩阵不等式约束和线性目标函数的凸优化问题。由于在求解过程中,应用MATLAB软件中LM I工具箱使得上述问题的求解更加方便、直接。计算机仿真试验表明所设计的主动控制系统能在较宽的频率范围对基础干扰和直接干扰所引起的微制造平台振动进行有效的控制。
Vibration control system is designed according to the LMI control theory,and its isolation performance against the floor disturbance and the direct disturbance produced by the ultra-precision vibration isolation equipments is researched. A set of weight matrices of the cost function is obtained by large number of simulations, The simulation results effectively demonstrate that the ul- tra-precision vibration isolation platform with a LMI controller has good isolation performance against the floor disturbance and the direct disturbance over wide frequency range.
出处
《现代制造工程》
CSCD
2005年第11期115-117,共3页
Modern Manufacturing Engineering
关键词
线性矩阵不等式
超精密隔振
主动振动控制
仿真
LMI
Ultra-precision vibration isolation
Active vibration isolation
Simulation
