摘要
叙述了统一计量光栅均匀性误差的检测方法．采用莫尔条纹对比度系数，将均匀性误差百分比表示转换成位移值表示．最后对影响均匀性误差的因素作了讨论．
A method on uniting calibration of homogeneity error of metrology gratings is describedin this paper,by means of the contrast coefficient of Moire fringe,the percent expression ofhomogeneity error is trans fored into displacement value expression. Finally,some factors ofaffecting homogeneeity error are discussed.
出处
《光学精密工程》
EI
CAS
CSCD
1996年第2期109-113,共5页
Optics and Precision Engineering
关键词
计量光栅
均匀性误差
莫尔条纹
对比度
Metrology gratings,Homogeneity error,Contrast of Moire fringe
