摘要
提出了大规模存储器总剂量效应实验方法,给出了随机存储器(SRAM)、电擦除电编程只读存储器(EEPROM)和闪速存储器(Flash ROM)的60Coγ总剂量效应,以及辐照后在100℃高温条件下退火的实验结果。对实验现象进行了分析。
A method for testing total dose effects (TDE) in very large-scale memory devices is presented. Experimental results of ^60 Coγ TDE's and post-irradiation annealing at 100 ℃ for SRAM's, EEPROM' s and flash ROM' s are described. And mechanism of TDE in very large-scale memory devices is analyzed.
出处
《微电子学》
CAS
CSCD
北大核心
2005年第5期489-492,共4页
Microelectronics