摘要
使用约化后的双温方程(DTE)对超短激光脉冲烧蚀铜薄层的过程进行了数值模拟;基于超短激光脉冲烧蚀过程中电子与晶格的温度不平衡性,分别模拟了这两个系统的温升过程,并由此得到了单脉冲烧蚀深度;通过变化激光能流,研究了脉冲能量对烧蚀深度的影响。模拟结果表明,随着激光能流的增加,相变爆炸引起的喷射出现得越深,同时材料烧蚀深度越大;理论计算与实验结果相吻合。
The ablation process of copper foil with ultrashort laser pulses was simulated by the double-temperature equation （DTE）, which was formatted simply. The ablation rate of the copper was attained on the basis of the simulation of the electronic and lattice＇s temperature. The simulation results show that the greater the laser fluence is, the longer the duration of ablation lasts and more material is ablated. The experimental results are accorded with the theoretical analysis.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2005年第9期1291-1294,共4页
Chinese Journal of Lasers
基金
教育部科学技术研究重大项目(10410)
天津市科技发展计划科技攻关培育项目(G043103911)
中国博士后科学基金资助课题
关键词
激光技术
超快激光技术
有限差分
双温方程
烧蚀深度
laser technique
ultrafast laser technique, finite difference method
double-temperature equation
ablation depth
