摘要
针对微电子器件封装作业对高速高精度的自动设备的需求,提出了一种具有平面五连杆结构的机械手,机械手采用集成了高分辨率角位移反馈元件的旋转直接驱动电机作为驱动元件.并给出其运动学、动力学模型及雅克比矩阵.结合并联机构和直接驱动的优点,实现了高速高精度运动.
This paper introduces a manipulator of planar 5 -links structure,which will be used in bonding process of microelectronic device. The direct drive motors integrated with high resolution encoder is used as driven part. The kinematics and dynamics models of the manipulators as well as Jacobian matrix are built. The robot can realize high speed/ high accuracy operation combining the advantages of parallel mechanism and direct drive.
出处
《机械与电子》
2005年第9期42-45,共4页
Machinery & Electronics
基金
国家高技术研究发展计划资助项目(2003AA404060)
关键词
运动学
动力学
直接驱动
高速高精度
kinematics
dynamics
direct drivehigh speed/high accuracy
