摘要
本文叙述了在环境扫描电镜中直接观察绝缘样品的原理．使用KYKY-1500环境扫描电镜，用环境电子信号成像与同一样品的二次电子信号成像相比较，给出了一些直接观察与检测的实例．结果表明：在KYKY-1500环境扫描电镜中，绝缘样品无需进行镀导电膜处理便可直接观察，图像清晰，样品表面不被破坏，为化工、材料、电子及光学产品的微观形态观察提供了一种新的手段．
The principle of direct observation of nonconducting material in an envi ronmental scanning electron microscoppe (ESEM) is reported first in this work. In order to examine the quality of images given by a new type of ESEM, KYKY15OO, comparison is made by examining two series of images: one is the image of an untreated specimen (such aJs rubber,wool fibers, quartz gass et al) by using ESEM-KYKY1500, and another the image of the same specimen, but Au-coated, using a general SEM (KYKY1000B). The pictures show that the image quality of the untreated samples by ESEM is rather good, It follows that insulating, uncoated, wet and either treated or untreated specimen can be examined in ESEM-KYKY1500.The applicationn range of KYKY-1500 extends over materials science, chemical engineering,electronic, opticals, and pharmaceutical industries, etc.
出处
《化工冶金》
CSCD
北大核心
1996年第1期66-70,共5页
关键词
环境扫描电镜
绝缘样品
直接观察
Enviromental scanning electron microscope, Direct observation,Non-conducting sample
