摘要
In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.
In situ opticaJ eAnssion spectra for an electron assisted hot filament diamond growth process were successfully measured with spatial resolution of better than 1 mm.The ethession lines from atoAnc hydrogen, molecular hydrogen, CH and CH+ radicals were observed in the visible region. Effects of the substrate bias on ethession spectra and diamond nucleation were also investigated. It is found that substratboan enhance the nucleation density, which may due to the changes of atoAnc hydrogen concentration and the increase of electron mean temperatuxe.
出处
《物理化学学报》
SCIE
CAS
CSCD
北大核心
1996年第2期102-104,共3页
Acta Physico-Chimica Sinica
基金
国家863高技术发展计划资助
关键词
光发射谱
CVD
金刚石膜
Optical emission spectrum, Reaction species,Electron assisted hot filament CVD
