摘要
介绍了采用应变片测量压电陶瓷微位移驱动器位移的原理和设计思想,介绍了实验装置的结构,给出了实验结果,证明将应变片直接粘贴在压电陶瓷基体表面测量其位移的方法是可行性的;通过对压电陶瓷滞回特性的测定,提出了建立压电陶瓷的控制模型的基本思路。
This paper introduces the criterion of piezo actuators using strain gage for closed loop control. The method is based on the principle of electrical resistance, four strain gages are directly bonded on the surface of ceramic stack to form a Wheatstone bridge. With the displacement of ceramic stack, the bridge resistance will be changed and this change can be converted to the shift of voltage. The experiment data are studied to find the hysteresis behavior of piezo in different condition, and find that those hysteresis curves are similar in shape. Just based on this characteristic, one of the curves is employed to establish the model of control. The results with the feedback of strain gage show that the hysteresis of the piezo actuators can be eliminated and the repeatability can be as good as several nanometers.
出处
《计测技术》
2005年第4期19-20,25,共3页
Metrology & Measurement Technology
