摘要
本工作深入研究了高纯氮、氢、氯化氢、氨、硼烷、硅烷、砷烷及磷烷中钼、钙、铬、铜、铁、钾、锰、钠、铅和锌十种常见金属杂质的测定方法,解决了易燃、易爆及剧毒气体的取样,溶液的吸收条件及基体分离等问题.建立了无火焰原子吸收光谱法测定ng·g^(-1)量级的杂质,方法灵敏,简便,对生产及研制工艺将起积极的指导作用.
Method for determination of trace metallic impurites in high-purity N_2, H_2, HCl,NH_3,B_2H_6,SiH_4, AsH_3 and pH_3 by flameless atomic absorption spectrometry havebeen established. The method is sensitive and simple, and satisfies the requirementof production.
基金
国家自然科学基金
关键词
高纯气体
痕量金属
杂质
测定
Determinaton of trace metallic impurites
High-purity gases
Flameless atomic absorption spectrometry
