摘要
设计并组建了一套基于交流量热法的薄膜热扩散率的自动测试系统,实现了薄膜热扩散率的自动化测量。该系统以PC机为主控机,利用串口与运动控制卡通信,控制压电陶瓷超声电机实现采样点的精确定位,通过GPIB总线控制锁相放大器,采集位于待测薄膜表面上的微热电偶的温度响应信号。由温度信号的幅值与采样距离的关系得到薄膜的热扩散率。讨论了该系统的软硬件组成、测试原理及功能特性,并给出了系统软件的工作界面和测试数据。
A test system of thermal diffusivity of thin films based on AC calorimetric method was described, which carried out automated measurement of thermal diffusivity of thin films. A motion controller connected with a personal computer was used to control an ultrasonic piezo-ceramic motor to realize precise orientation, a programmable lock-in amplifier collected the temperature response from the micro thermocouple attached on the films and transmitted data to the computer through GPIB bus. The basic constitutes of hardware and software, working principle and character of the system were discussed and the working interface of the software and the testing data were given as well.
出处
《仪器仪表学报》
EI
CAS
CSCD
北大核心
2005年第8期797-800,821,共5页
Chinese Journal of Scientific Instrument
基金
国家自然科学基金(59995550-5)资助。
关键词
热扩散率
交流量热法
自动测试系统
GPIB总线
Thermal diffusivity AC calorimetric method Automated measuring system GPIB bus
