摘要
以TiCl4为原料,采用高频等离子化学气相沉积(RF—PCVD)法制备了TiO2纳米微晶,考察了控制粒径大小及晶相转化的关键操作条件。借助XPS、TEM、XRD、BET等技术对颗粒的化学组成、形貌、晶相结构等进行了表征.研究表明:所得TiO2纳米微晶大部分为球形体颗粒,粒径30—50 nm,单分散性良好;颗粒中锐钛相和金红石相两相共存,结晶完整;金红石相含量在26.7%-53.6%之间可调.
TiO2 nano-microcrystals were prepared by Radio Frequency Plasma Chemical Vapor Deposition （RF-PCVD） with TiC14. The operation conditions controlling the particle size and crystal transition were also investigated. The properties of Ti02 particles including chemical composition, morphology, size, structure of crystal phase were characterized by XPS, TEM, XRD and BET etc. The results show that the most particles in the obtained TiO2nano-microcrystals were spherical. The particle size was about 30 - 50 nm with narrow distribution. Both anatase and futile phases with complete crystallization were found in particles and the futile phase can be adjusted from 26.7% to 53.6%.
出处
《材料科学与工艺》
EI
CAS
CSCD
北大核心
2005年第4期411-414,419,共5页
Materials Science and Technology
基金
国家自然科学基金资助项目(29776032)山西省科技攻关项目(202092).
