摘要
在论述Ｘ光掠入射平面反射镜工作原理的基础上，重点讨论了超高精度Ｘ光镍平面反射镜的制备过程，研制出表面粗糙度小于１．５ｎｍ的平面反射镜。测试和使用表明：在掠入射角为５°时，该反射镜的反射率在５４％以上。
In this paper, the basic paper, the basic workin principle of an X-ray grazing mirror system is introduced. An emphasis is placed on the manufacturing technology of the super-highaccuracy mirror system. A Ni mirror system with less than 1.5nm surface roughness has been made out. The reflectivity of the Ni mirror system is more than 54% at a 5°grazing angle.
出处
《中国激光》
EI
CAS
CSCD
北大核心
1995年第4期276-280,共5页
Chinese Journal of Lasers
