摘要
本文简要地综述了多种技术途径制备ＳＯＩ材料的发展现状，并着重讨论了ＳＭＯＸ／ＳＯＩ的潜在优点、发展趋势及其在宇航微电子技术发展中的应用前景．
The development of production of SOI material through many kinds of technologies is discussed briefly in this article, emphasizing in potential advantage,trend of development and the prospect of application in the technicoal development of aerospace microelectronics.
出处
《微电子学与计算机》
CSCD
北大核心
1995年第2期1-5,共5页
Microelectronics & Computer
关键词
SOI
航天
硅
SOI,SIMOX,VLSIC,VHSIC
