摘要
用数据采集系统采集旋转式机械设备旋转构件上所选测点的振动位移，并计算出该振动参数基本统计特性的数值，就可以应用本文提出的判断不等式对设备的工况进行初步评估。动力增益因子的引入使静态测量精度能用于对振动动态过程的分析。以集成电路制造专用设备硅片磨床为例，阐述了这种评估方法。
A method to evaluate the mode of operation of rotary tools using statistical character- istics of vibration shift is described in the paper.In this technique,vibration,shift is sampled at se- lected measuring points on the rotating shaft of a rotary tool by a data sampling circuit,and then the numerical value of the basic statistical characteristics of the vicration shift is calculated and a judgement inequality proposed in the paper is applied to give a preliminary evaluation of the oper- ating tool.As an example,application of the evaluation method to a special wafer grinder used in IC production is described.
出处
《微电子学》
CAS
CSCD
1995年第3期40-43,共4页
Microelectronics
关键词
工况评估
旋转式
机械设备
Rotary tool,Operating mode evaluation,Semiconductor equipment
