摘要
半导体工艺设备是集成电路发展的重要先决条件。集成电路工艺技术的改进提高和产品的更新换代都与工艺设备息息相关。如何发展我国的半导体工艺设备，促进集成电路产业的发展，是我们应当认真思考的一个问题。本文在简单回顾了我国半导体工艺设备的发展历程之后，论述了它的现状与面临的问题，并就今后的发展提出了几点具体意见。
Aa a basic and important tool,semiconductor equipments are closely related to the improvement of IC tech-nologies and upating of IC products.How to develop our own semiconductor equipment industry is a subject which weshould take into serious account.The development history of China’s semiconductor equipment industry is briefly re-viewed. The present situation of the industry is described and the problems associated are disecussed.Finally,comments andsuggestions are made in the paper.
出处
《微电子学》
CAS
CSCD
1995年第1期6-9,共4页
Microelectronics
关键词
半导体工艺
设备
集成电路
产业
Semiconductor equipment.Integrated circuit industry
