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高精度多种进制圆光栅制造方法的研究

Research on Generating Method of High Accuracy Radial Gratings with Various Encoding Systems
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摘要 本文提出了一种用于CAM系统的最小公倍数法,以及用该方法研制的多种进制增量式圆光栅CAM刻划系统.应用该方法有效地解决了多种进制增量式圆光栅和多种进制指示光栅的刻划难题,实现了在一种进制的光电图刻线机上刻划多种进制圆光栅。另外,详细介绍了其实现方法,以及用于该CAM系统的硬件和软件. In this paper,we introduce a new method of least common multiple used in a CAM system and a new CAM system developed by using the method.The CAM system is used for generating increasing metrological radial gratings with various encoding systems.The tough problem of generating increasing radial gratings and index gratings with various encoding system has been efficiently solved by using the method.It has realized the goal that gratings with various encoding systems can be made on a photoengraving machine with one kind of encoding system.Also,we present the way how to realize the method, hardware and software used in the CAM system in detail.
出处 《量子电子学》 CAS CSCD 1995年第1期70-74,共5页
关键词 计量光栅 多种进制 增量式 圆光栅 制造 CAM, metrological grating
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